Time evolution of the electron energy distribution function in pulsed microwave
magnetoplasma in H2

La evolución temporal de la función de distribución de energía electrónica (EEDF) se mide en un
Magnetoplasma pulsado de microondas de hidrógeno trabajando a 2,45 GHz. El análisis se realiza en
resonancia (B=0.087 T) y en condiciones fuera de resonancia (B=0.120 T), a dos presiones (0.38 Pa y
0,62 Pa), respectivamente, y para diferentes potencias de microondas incidentes.
Se discute el efecto del campo magnético en la cinética del electrón y se realiza un análisis crítico de las mediciones de la sonda de Langmuir.
La función de distribución de energía de los electrones se calcula utilizando el método Druyvesteyn
y se corrige utilizando la teoría desarrollada por Arslanbekov en el caso de magnetizado

Time evolution of the Electron Energy Distribution Function (EEDF) is measured in pulsed
hydrogen microwave magnetoplasma working at 2.45 GHz. Analysis is performed both in
resonance (B¼0.087 T) and off-resonance conditions (B¼0.120 T), at two pressures (0.38 Pa and
0.62 Pa), respectively, and for different incident microwave powers. The important effect of the
magnetic field on the electron kinetic is discussed, and a critical analysis of Langmuir probe measurements
is given. The Electron Energy Distribution Function is calculated using the Druyvesteyn
theory (EEDF) and is corrected using the theory developed by Arslanbekov in the case of magnetized
plasma. Three different components are observed in the EEDF, whatever the theory used.
They are: (a) a low electron energy component at energy lower than 10 eV, which is ascribed to the
electron having inelastic collisions with heavy species (H2, H, ions), (b) a high energy component
with a mean energy ranging from 10 to 20 eV, which is generally ascribed to the heating of the
plasma by the incident microwave power, and (c) a third component observed between the two
other ones, mainly at low pressure and in resonance conditions, has been correlated to the electron
rotation in the magnetic field