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Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering

Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering

Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering

tipo de documento Publicacion

Etiquetas: erosion, dots, surfaces

Publicado en: revista: applied physics letters, periodo: 1, volumen: online, número: 23, página inicial: 233101.1, página final: 233101.3

Fecha publicación: 01/12/2006

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