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Thermal stability of HfO2-on-GaAs nanopatternsclose
Fabrication of HfO2 patterns by laser interference nanolithography and selective dry etching for III-V CMOS applicationclose
Nanostructuring of ultra-thin HfO2 layers for high-k/III-V device applicationclose
Nanoscale selective plasma etching of ultrathin HfO2 layers for advanced complementary metal-oxide-semiconductor devicesclose