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Intrinsic anomalous surface roughening of TiN films deposited by reactive sputteringmore_vert
Intrinsic anomalous surface roughening of TiN films deposited by reactive sputteringclose

Intrinsic anomalous surface roughening of TiN films deposited by reactive sputtering

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Etiquetas: si, cu, chemical-vapor-deposition, x-ray reflectivity, density, growth, instability, interfaces, roughness, microstructure