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Growth dynamics of reactive-sputtering-deposited AlN filmsmore_vert
Growth dynamics of reactive-sputtering-deposited AlN filmsclose

Growth dynamics of reactive-sputtering-deposited AlN films

tipo de documento Publicacion

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Etiquetas: buffer layers, acoustic-wave devices, microscop, aluminum nitride films, x-ray reflectivity, chemical-vapor-deposition, surface-roughness, instability

Intrinsic anomalous surface roughening of TiN films deposited by reactive sputteringmore_vert
Intrinsic anomalous surface roughening of TiN films deposited by reactive sputteringclose

Intrinsic anomalous surface roughening of TiN films deposited by reactive sputtering

tipo de documento Publicacion

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Etiquetas: si, cu, chemical-vapor-deposition, x-ray reflectivity, density, growth, instability, interfaces, roughness, microstructure

Universal non-equilibrium phenomena at submicrometric surfaces and interfacesmore_vert
Universal non-equilibrium phenomena at submicrometric surfaces and interfacesclose

Universal non-equilibrium phenomena at submicrometric surfaces and interfaces

tipo de documento Publicacion

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Etiquetas: chemical-vapor-deposition, nonlinear evolution, morphological instabilities, thin-film growth, vicinal surfaces, aeolian sand ripples, ion-sputtered surfaces, model, equation, dynamics