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Kinetics of HfO2 etching and impurity elimination with atomichydrogen beamsmore_vert
Kinetics of HfO2 etching and impurity elimination with atomichydrogen beamsclose

Kinetics of HfO2 etching and impurity elimination with atomichydrogen beams

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Etiquetas: hidrógeno atómico, atomic hydrogen, ultra-thin films, capas ultra-delgadas, impurity, hfo2, impureza, ataque, hafnio, etching, hafnium