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Concurrent segregation and erosion effects in medium-energy iron beam patterning of silicon surfacesmore_vert
Concurrent segregation and erosion effects in medium-energy iron beam patterning of silicon surfacesclose

Concurrent segregation and erosion effects in medium-energy iron beam patterning of silicon surfaces

tipo de documento Publicacion

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Etiquetas: ion beam sputtering, iron silicide, patterning, silicon, implantation

First tests of the ion irradiation and implantation beamline at the CMAMmore_vert
First tests of the ion irradiation and implantation beamline at the CMAMclose

First tests of the ion irradiation and implantation beamline at the CMAM

tipo de documento Publicacion

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Autores: Rodriguez, A., Olivares, José, Narros, Jaime, Alvarez, Jorge, Zucchiatti, A., García, J.M., Benedicto Córdoba, Marcos, Vila, R., Maira, A., Climent Font, Aurelio, De Aragón, Fernando, Jimenez Rey, David, Bachiller Perea, Diana, Muñoz Martín, Angel, Nakbi, A., Gomez Ferrer, Begoña

Etiquetas: materiales, barrido, cryostat, criostato, beam sweep, acelerador, horno, materials, iones, furnace, ions, accelerator, implantación, implantation